Fabrication of Ordered SnO2 Nanostructures with Enhanced Humidity Sensing Performance

Ordered SnO₂ nanostructures were prepared as humidity sensors by nanosphere lithography with the magnetron sputtering technique. The X-ray diffraction patterns of SnO₂ nanostructures show that all intense diffraction peaks correspond to the crystallographic planes of SnO₂. The Atomic Force Microscope (AFM) mage shows that these SnO₂ nanostructures exhibited a classic honeycomb structure. The resistance of this sensor was measured to show that the resistance of the sensor decreases with an increase from lower relative humidity (RH) to higher RH. Additionally, the longest response/recovery time was 32 s/42 s for 11-96% RH. The hysteresis for the SnO₂ nanostructure sensor was <5%.